Photolithography of SU-8 microtowers for a 100-turn, 3-D toroidal microinductor
نویسندگان
چکیده
منابع مشابه
SU-8 Photolithography as a Toolbox for Carbon MEMS
The use of SU-8 as precursor for glass-like carbon, or glassy carbon, is presented here. SU-8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy-based precursors can be patterned in a variety of ways, photolithography is chosen due to its resolution and reproducibility. Here, a number of improvements to traditional photolithography are introduced to increase the ...
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The current contribution reports about the fabrication technology for the development of novel microfluidic impedance spectroscopy sensors that are directly attachable on 3-D molded interconnect devices (3DMID) that provides an opportunity to create reduced-scale sensor devices for 3-D applications. Advantages of the MID technology in particular for an automotive industry application were recen...
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Heat transfer characteristics of air flows in concentric toroidal annular tubes filled with porous media were numerically investigated. The toroidal annulus is constant walls temperature where the outer wall temperature is lower than the inlet temperature. The numerical methodology was based on the finite difference approximation method. The computations were performed for vertical and horizont...
متن کاملTwo-turn Contrawound Toroidal Helix Antenna
The two-turn CWTHA is analyzed from a small diameter that allows constant current, through the third resonance. Around the third resonance, and around the first resonance and below, the bandwidth is much less than 1%. The very low (or very high) values of resistance make matching difficult and lossy. At the second resonance the resistance is modest, but the rapid change of reactance limits the ...
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ژورنال
عنوان ژورنال: Micro and Nano Systems Letters
سال: 2018
ISSN: 2213-9621
DOI: 10.1186/s40486-018-0076-z